An Investigation of Sodium Alumina-Silicate Molecular Sieves for the Pretreatment of Arsine Used in a Hydride VPE Reactor

D. N. Buckley, M. M. Matthiesen

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)2749-2751
Number of pages3
JournalJournal of the Electrochemical Society
Volume136
Issue number9
DOIs
Publication statusPublished - Sep 1989
Externally publishedYes

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