An Investigation of Sodium Alumina-Silicate Molecular Sieves for the Pretreatment of Arsine Used in a Hydride VPE Reactor

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Original language	English
Pages (from-to)	2749-2751
Number of pages	3
Journal	Journal of the Electrochemical Society
Volume	136
Issue number	9
DOIs	https://doi.org/10.1149/1.2097583
Publication status	Published - Sep 1989
Externally published	Yes

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title = "An Investigation of Sodium Alumina-Silicate Molecular Sieves for the Pretreatment of Arsine Used in a Hydride VPE Reactor",

author = "Buckley, \{D. N.\} and Matthiesen, \{M. M.\}",

year = "1989",

month = sep,

doi = "10.1149/1.2097583",

language = "English",

volume = "136",

pages = "2749--2751",

journal = "Journal of the Electrochemical Society",

issn = "0013-4651",

number = "9",

}

TY - JOUR

T1 - An Investigation of Sodium Alumina-Silicate Molecular Sieves for the Pretreatment of Arsine Used in a Hydride VPE Reactor

AU - Buckley, D. N.

AU - Matthiesen, M. M.

PY - 1989/9

Y1 - 1989/9

UR - https://www.scopus.com/pages/publications/0024731968

U2 - 10.1149/1.2097583

DO - 10.1149/1.2097583

M3 - Article

AN - SCOPUS:0024731968

SN - 0013-4651

VL - 136

SP - 2749

EP - 2751

JO - Journal of the Electrochemical Society

JF - Journal of the Electrochemical Society

IS - 9

ER -