Capacity modelling of a wet bench cluster tool with material handling robot

In this study, a wet bench cluster is examined through a highly detailed simulation model to first understand the tool performance under different process mixes and lot arrival patterns and second to improve the tool performance using different recipe sequences and loading policies. Results of the simulation experiments show that there is benefit in rationalising the number of recipes to increase the opportunity for full loads. In addition, the wet bench capacity is significantly improved by reconfiguration of recipe sequences. The article demonstrates the successful use of a detailed simulation model of a wet bench cluster tool to support process engineering changes.