Composition and structure of hafnia films on silicon
- T. P. Smirnova
- , V. V. Kaichev
- , L. V. Yakovkina
- , V. I. Kosyakov
- , S. A. Beloshapkin
- , F. A. Kuznetsov
- , M. S. Lebedev
- , V. A. Gritsenko
- RAS - Nikolaev Institute of Inorganic Chemistry, Siberian Branch
- RAS - Boreskov Institute of Catalysis, Siberian Branch
- RAS - Institute of Semiconductor Physics, Siberian Branch
Research output: Contribution to journal › Article › peer-review