TY - GEN
T1 - Control-oriented modelling of an experimental Ar-O2 plasma process
AU - Iordanov, Petar
AU - Ringwood, John
PY - 2010
Y1 - 2010
N2 - Development of a control-oriented model of an experimental plasma reactor is presented in this paper. The model structure is suitably partitioned in order to facilitate any subsequent control design. In the model, the linear dynamical part is conveniently separated from a static nonlinearity, which in turn allows identification to be performed for both parts independently. Validation results indicate that the model gives a reasonable representation of the studied plasma process.
AB - Development of a control-oriented model of an experimental plasma reactor is presented in this paper. The model structure is suitably partitioned in order to facilitate any subsequent control design. In the model, the linear dynamical part is conveniently separated from a static nonlinearity, which in turn allows identification to be performed for both parts independently. Validation results indicate that the model gives a reasonable representation of the studied plasma process.
UR - http://www.scopus.com/inward/record.url?scp=77954395234&partnerID=8YFLogxK
U2 - 10.1109/ICIT.2010.5472657
DO - 10.1109/ICIT.2010.5472657
M3 - Conference contribution
AN - SCOPUS:77954395234
SN - 9781424456970
T3 - Proceedings of the IEEE International Conference on Industrial Technology
SP - 82
EP - 87
BT - Proceedings - ICIT 2010
T2 - IEEE-ICIT 2010 International Conference on Industrial Technology, ICIT 2010
Y2 - 14 March 2010 through 17 March 2010
ER -