Control-oriented modelling of an experimental Ar-O2 plasma process

Petar Iordanov, John Ringwood

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

Development of a control-oriented model of an experimental plasma reactor is presented in this paper. The model structure is suitably partitioned in order to facilitate any subsequent control design. In the model, the linear dynamical part is conveniently separated from a static nonlinearity, which in turn allows identification to be performed for both parts independently. Validation results indicate that the model gives a reasonable representation of the studied plasma process.

Original languageEnglish
Title of host publicationProceedings - ICIT 2010
Subtitle of host publicationIEEE-ICIT 2010 International Conference on Industrial Technology
Pages82-87
Number of pages6
DOIs
Publication statusPublished - 2010
EventIEEE-ICIT 2010 International Conference on Industrial Technology, ICIT 2010 - Vina del Mar, Chile
Duration: 14 Mar 201017 Mar 2010

Publication series

NameProceedings of the IEEE International Conference on Industrial Technology

Conference

ConferenceIEEE-ICIT 2010 International Conference on Industrial Technology, ICIT 2010
Country/TerritoryChile
CityVina del Mar
Period14/03/1017/03/10

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