Damage effects in silicon and MNOS structures caused by beams of ionized and neutral argon atoms with energies below 5 keV

U. Bangert, C. Jeynes, P. Goodhew, IH Wilson

Research output: Contribution to journalArticlepeer-review

Fingerprint

Dive into the research topics of 'Damage effects in silicon and MNOS structures caused by beams of ionized and neutral argon atoms with energies below 5 keV'. Together they form a unique fingerprint.

Material Science

Engineering