Developing an Energy-Efficient Electrostatic-Actuated Micro-Accelerometer for Low-Frequency Sensing Applications

Micro-accelerometers are in high demand across many due to their compact size, low energy consumption, and excellent precision. Since gravity causes a large movement when the device is positioned vertically, measuring low gravitational acceleration is challenging. This study examines the intrinsic relationship between applied voltage levels and displacement in micro-accelerometers. The study introduces a novel design that integrates hybrid flexures, comprising both linear and angular configurations, with an out-of-plane overlap varying (OPOV) electrostatic actuation mechanism. This design aims to measure the micro-accelerometer’s movement and low frequency response. The proposed device with silicon material is designed and simulated using the IntelliSuite® software, considering its small dimensions and 25 µm thickness. The norm value of 28.0916 μN from gravity’s reaction forces on the body, a resonant frequency of 179.668 Hz at the first desired mode, and a maximum stress of 24.7 MPa were obtained through the electro-mechanical analysis. A comparison of the proposed design was conducted with other configurations, measuring a frequency of 179.668 Hz at a minimum downward displacement of 7.69916 µm under the influence of gravity without electrostatic mechanisms. Following this, an electrostatic actuation mechanism was introduced to minimize displacement by applying different voltage levels, including 1 V, 1.5 V, and 3 V. At 3 V, a significant improvement in displacement reduction was observed compared to the other applied voltages. Additionally, dynamic and sensitivity analyses were carried out to validate the performance of the proposed design further.