TY - GEN
T1 - Development of a novel humidity sensor with error-compensated measurement system
AU - Arshak, K.
AU - Twomey, K.
AU - Heffernan, D.
PY - 2002
Y1 - 2002
N2 - This paper documents the creation of a complete PC-Based humidity sensing system, implemented using LabVIEW from National Instruments. The humidity sensor, which has a measured sensitivity of 0.25%/RH%, is manufactured by thin film technology from a novel combination of SiO/In2O3. Both the humidity sensor and a standard temperature sensor are interfaced to a PC using a front-end signal conditioning circuit. The entire system has been analyzed mathematically and the necessary algorithms for error-compensation have been developed. The resulting measurement system is efficient, accurate and flexible.
AB - This paper documents the creation of a complete PC-Based humidity sensing system, implemented using LabVIEW from National Instruments. The humidity sensor, which has a measured sensitivity of 0.25%/RH%, is manufactured by thin film technology from a novel combination of SiO/In2O3. Both the humidity sensor and a standard temperature sensor are interfaced to a PC using a front-end signal conditioning circuit. The entire system has been analyzed mathematically and the necessary algorithms for error-compensation have been developed. The resulting measurement system is efficient, accurate and flexible.
UR - http://www.scopus.com/inward/record.url?scp=79551608205&partnerID=8YFLogxK
U2 - 10.1109/MIEL.2002.1003178
DO - 10.1109/MIEL.2002.1003178
M3 - Conference contribution
AN - SCOPUS:79551608205
SN - 0780372352
SN - 9780780372351
T3 - 2002 23rd International Conference on Microelectronics, MIEL 2002 - Proceedings
SP - 215
EP - 218
BT - 2002 23rd International Conference on Microelectronics, MIEL 2002 - Proceedings
PB - IEEE Computer Society
T2 - 2002 23rd International Conference on Microelectronics, MIEL 2002
Y2 - 12 May 2002 through 15 May 2002
ER -