@inproceedings{768e328b222545d393e78b74a3d240f2,
title = "Development of a room temperature thin film In2O3, ZnO and SnO2 ozone sensor",
abstract = "Thin films of Indium-zinc-tin oxide have been prepared by Vacuum Thermal Evaporation (VTE). The sensing characteristics of these films to environmentally relevant ozone concentrations were studied at room temperature. The effects of film thickness, deposition rate and annealing were investigated. The resistance of the thin film was found to be inversely proportional to the deposition rate. The highest sensitivity of the ozone sensors was found at a deposition rate of 1.2 nm/s - 1.4 nm/s. In addition the 03 sensors were found to perform best with a 40 nm thick sensing layer. In2O3, ZnO and SnO 2 were deposited on alumina substrates containing interdigitated electrodes by means of VTE. These results have shown that ln203:ZnO:SnO2 thin films prepared by VTE method are promising for room temperature ozone sensing.",
keywords = "Indium oxide, Ozone sensor, Thin film",
author = "K. Arshak and G. Hickey and E. Forde and J. Harris",
year = "2007",
doi = "10.1109/ISIE.2007.4374831",
language = "English",
isbn = "1424407559",
series = "IEEE International Symposium on Industrial Electronics",
pages = "1536--1541",
booktitle = "2007 IEEE International Symposium on Industrial Electronics, ISIE 2007, Proceedings",
note = "2007 IEEE International Symposium on Industrial Electronics, ISIE 2007 ; Conference date: 04-06-2007 Through 07-06-2007",
}