Diffraction contrast near heterostructure boundariesits nature and its application

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Abstract

Two phenomena of diffraction contrast arising at or near IIIV compound heterostructure boundaries are described and quantitatively analyzed. In the first observation/fringe contrast at boundaries inclined to the electron beam is discussed. Theoretical fringe profiles are generated according to the theory by Gevers et al. in 1964, which are then compared with experimental profiles. Applications to the characterization of AlGaAs/GaAs and InGaAsP/InP interfaces regarding composition, abruptness, and lattice tilt are presented. In the second study a new and very sensitive characterization technique for the direct determination of the strain in strainedlayer structures is described. The method uses electron microscope images of 90wedges, which exhibit a shift in the thickness contours due to strain relaxation at the edge, and compares these to images which are obtained theoretically by implementing finite element strain calculations in wedges in the dynamical theory of diffraction contrast. The considerable potential of this method is demonstrated on the strain analysis of strained GaInAs/GaAs structures.1993 WileyLiss, Inc. Copyright1993 WileyLiss, Inc.

Original languageEnglish
Pages (from-to)288-298
Number of pages11
JournalMicroscopy Research and Technique
Volume24
Issue number4
DOIs
Publication statusPublished - 1 Mar 1993
Externally publishedYes

Keywords

  • /Boundary
  • 90wedges
  • Finite element method
  • Strain analysis

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