Effect of ECR plasma on the luminescence efficiency of InGaAs and InP
- F. Ren
- , D. N. Buckley
- , K. M. Lee
- , S. J. Pearton
- , R. A. Bartynski
- , C. Constantine
- , W. S. Hobson
- , R. A. Hamm
- , P. C. Chao
- Nokia
- University of Florida
- Rutgers - The State University of New Jersey, New Brunswick
- Plasma Therm Inc.
- Martin Marietta Corporation
Research output: Contribution to journal › Article › peer-review