Fabrication of a high temperature-resistance optical fibre micro pressure sensor

K. Bremer; E. Lewis; B. Moss; G. Leen; S. Lochmann; I. Mueller

doi:10.1109/SSD.2009.4956676

Fabrication of a high temperature-resistance optical fibre micro pressure sensor

K. Bremer, E. Lewis, B. Moss, G. Leen, S. Lochmann, I. Mueller

Department of Electronics & Computer Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

A micro diaphragm-based Extrinsic Fabry-Perot Interferometric (EFPI) pressure sensor with high temperature immunity is described. The EFPI pressure sensor consists of a single mode silica glass optical fiber, a glass capillary and a glass diaphragm, which are fused together using a conventional fusion splicer. This eliminates the need for the use of other joining materials, e.g. epoxy, allows any thermal mismatch between different materials to be almost completely eliminated and hence the sensor is capable of high temperature operation. In addition, the EFPI pressure sensor is cheap and relatively easy to produce as only splicing, polishing and wet etching are necessary. Moreover, due to its small size, a frequency response of several MHz can be achieved.

Original language	English
Title of host publication	2009 6th International Multi-Conference on Systems, Signals and Devices, SSD 2009
DOIs	https://doi.org/10.1109/SSD.2009.4956676
Publication status	Published - 2009
Event	2009 6th International Multi-Conference on Systems, Signals and Devices, SSD 2009 - Djerba, Taiwan, Province of China Duration: 23 Mar 2009 → 26 Mar 2009

Publication series

Name	2009 6th International Multi-Conference on Systems, Signals and Devices, SSD 2009

Conference

Conference	2009 6th International Multi-Conference on Systems, Signals and Devices, SSD 2009
Country/Territory	Taiwan, Province of China
City	Djerba
Period	23/03/09 → 26/03/09

Keywords

Fabry-perot interferometer
Optical fibre sensors
Pressure measurement

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10.1109/SSD.2009.4956676

Cite this

Bremer, K., Lewis, E., Moss, B., Leen, G., Lochmann, S., & Mueller, I. (2009). Fabrication of a high temperature-resistance optical fibre micro pressure sensor. In 2009 6th International Multi-Conference on Systems, Signals and Devices, SSD 2009 Article 4956676 (2009 6th International Multi-Conference on Systems, Signals and Devices, SSD 2009). https://doi.org/10.1109/SSD.2009.4956676

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title = "Fabrication of a high temperature-resistance optical fibre micro pressure sensor",

abstract = "A micro diaphragm-based Extrinsic Fabry-Perot Interferometric (EFPI) pressure sensor with high temperature immunity is described. The EFPI pressure sensor consists of a single mode silica glass optical fiber, a glass capillary and a glass diaphragm, which are fused together using a conventional fusion splicer. This eliminates the need for the use of other joining materials, e.g. epoxy, allows any thermal mismatch between different materials to be almost completely eliminated and hence the sensor is capable of high temperature operation. In addition, the EFPI pressure sensor is cheap and relatively easy to produce as only splicing, polishing and wet etching are necessary. Moreover, due to its small size, a frequency response of several MHz can be achieved.",

keywords = "Fabry-perot interferometer, Optical fibre sensors, Pressure measurement",

author = "K. Bremer and E. Lewis and B. Moss and G. Leen and S. Lochmann and I. Mueller",

year = "2009",

doi = "10.1109/SSD.2009.4956676",

language = "English",

isbn = "9781424443468",

series = "2009 6th International Multi-Conference on Systems, Signals and Devices, SSD 2009",

booktitle = "2009 6th International Multi-Conference on Systems, Signals and Devices, SSD 2009",

note = "2009 6th International Multi-Conference on Systems, Signals and Devices, SSD 2009 ; Conference date: 23-03-2009 Through 26-03-2009",

}

Bremer, K, Lewis, E, Moss, B, Leen, G, Lochmann, S & Mueller, I 2009, Fabrication of a high temperature-resistance optical fibre micro pressure sensor. in 2009 6th International Multi-Conference on Systems, Signals and Devices, SSD 2009., 4956676, 2009 6th International Multi-Conference on Systems, Signals and Devices, SSD 2009, 2009 6th International Multi-Conference on Systems, Signals and Devices, SSD 2009, Djerba, Taiwan, Province of China, 23/03/09. https://doi.org/10.1109/SSD.2009.4956676

Fabrication of a high temperature-resistance optical fibre micro pressure sensor. / Bremer, K.; Lewis, E.; Moss, B. et al.
2009 6th International Multi-Conference on Systems, Signals and Devices, SSD 2009. 2009. 4956676 (2009 6th International Multi-Conference on Systems, Signals and Devices, SSD 2009).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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T1 - Fabrication of a high temperature-resistance optical fibre micro pressure sensor

AU - Bremer, K.

AU - Lewis, E.

AU - Moss, B.

AU - Leen, G.

AU - Lochmann, S.

AU - Mueller, I.

PY - 2009

Y1 - 2009

N2 - A micro diaphragm-based Extrinsic Fabry-Perot Interferometric (EFPI) pressure sensor with high temperature immunity is described. The EFPI pressure sensor consists of a single mode silica glass optical fiber, a glass capillary and a glass diaphragm, which are fused together using a conventional fusion splicer. This eliminates the need for the use of other joining materials, e.g. epoxy, allows any thermal mismatch between different materials to be almost completely eliminated and hence the sensor is capable of high temperature operation. In addition, the EFPI pressure sensor is cheap and relatively easy to produce as only splicing, polishing and wet etching are necessary. Moreover, due to its small size, a frequency response of several MHz can be achieved.

AB - A micro diaphragm-based Extrinsic Fabry-Perot Interferometric (EFPI) pressure sensor with high temperature immunity is described. The EFPI pressure sensor consists of a single mode silica glass optical fiber, a glass capillary and a glass diaphragm, which are fused together using a conventional fusion splicer. This eliminates the need for the use of other joining materials, e.g. epoxy, allows any thermal mismatch between different materials to be almost completely eliminated and hence the sensor is capable of high temperature operation. In addition, the EFPI pressure sensor is cheap and relatively easy to produce as only splicing, polishing and wet etching are necessary. Moreover, due to its small size, a frequency response of several MHz can be achieved.

KW - Fabry-perot interferometer

KW - Optical fibre sensors

KW - Pressure measurement

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DO - 10.1109/SSD.2009.4956676

M3 - Conference contribution

AN - SCOPUS:67650514225

SN - 9781424443468

T3 - 2009 6th International Multi-Conference on Systems, Signals and Devices, SSD 2009

BT - 2009 6th International Multi-Conference on Systems, Signals and Devices, SSD 2009

T2 - 2009 6th International Multi-Conference on Systems, Signals and Devices, SSD 2009

Y2 - 23 March 2009 through 26 March 2009

ER -

Fabrication of a high temperature-resistance optical fibre micro pressure sensor

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