Skip to main navigation Skip to search Skip to main content

Grain-size effect on a plasma-based copper etch process

  • Guojun Liu
  • , Yue Kuo
  • , Shafaat Ahmed
  • , Denis N. Buckley
  • , Tanjim Tanaka-Ahmed

Research output: Contribution to journal › Article › peer-review

Fingerprint

Dive into the research topics of 'Grain-size effect on a plasma-based copper etch process'. Together they form a unique fingerprint.
Sort by

Engineering

Material Science