Hardness measurement of CVD diamond coatings on SiC substrates

S. Chowdhury, E. de Barra, Michael T. Laugier

Research output: Contribution to journalArticlepeer-review

Abstract

Hardness of CVD diamond coatings was determined by CSM™ nanohardness tester (NHT) and Vickers microhardness tester. Nanoindentation measurements were performed with loads from 50 to 300 mN and measured hardness and elastic modulus values were about 105 and 1147 GPa, respectively. These values were compared with the values found from the Vickers microhardness tester. This work justifies the use of the nanoindentation technique over conventional microhardness tests for reliable measurement of hardness of chemical vapour deposited (CVD) diamond coatings as microhardness testing resulted in localised damage precluding accurate measurement.

Original languageEnglish
Pages (from-to)200-205
Number of pages6
JournalSurface and Coatings Technology
Volume193
Issue number1-3 SPEC. ISS.
DOIs
Publication statusPublished - 1 Apr 2005

Keywords

  • Diamond coatings
  • Hardness
  • Nanoindentation
  • Vickers microhardness tester

Fingerprint

Dive into the research topics of 'Hardness measurement of CVD diamond coatings on SiC substrates'. Together they form a unique fingerprint.

Cite this