TY - GEN
T1 - Implementing a new genetic algorithm to solve the capacity allocation problem in the photolithography area
AU - Ghasemi, Amir
AU - Heavey, Cathal
AU - Kabak, Kamil Erkan
N1 - Publisher Copyright:
© 2018 IEEE
PY - 2018/7/2
Y1 - 2018/7/2
N2 - Photolithography plays a key role in semiconductor manufacturing systems. In this paper, we address the capacity allocation problem in the photolithography area (CAPPA) subject to machine dedication and tool capability constraints. After proposing the mathematical model of the considered problem, we present a new genetic algorithm named RGA which was derived from a psychological concept called Reference Group in society. Finally, to evaluate the efficiency of the algorithm, we solve a real case study problem from a semiconductor manufacturing company in Ireland and compare the results with one of the genetic algorithms proposed in the literature. Results show the effectiveness and efficiency of RGA to solve CAPPA in a reasonable time.
AB - Photolithography plays a key role in semiconductor manufacturing systems. In this paper, we address the capacity allocation problem in the photolithography area (CAPPA) subject to machine dedication and tool capability constraints. After proposing the mathematical model of the considered problem, we present a new genetic algorithm named RGA which was derived from a psychological concept called Reference Group in society. Finally, to evaluate the efficiency of the algorithm, we solve a real case study problem from a semiconductor manufacturing company in Ireland and compare the results with one of the genetic algorithms proposed in the literature. Results show the effectiveness and efficiency of RGA to solve CAPPA in a reasonable time.
UR - http://www.scopus.com/inward/record.url?scp=85062598473&partnerID=8YFLogxK
U2 - 10.1109/WSC.2018.8632204
DO - 10.1109/WSC.2018.8632204
M3 - Conference contribution
AN - SCOPUS:85062598473
T3 - Proceedings - Winter Simulation Conference
SP - 3696
EP - 3707
BT - WSC 2018 - 2018 Winter Simulation Conference
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 2018 Winter Simulation Conference, WSC 2018
Y2 - 9 December 2018 through 12 December 2018
ER -