In-situ measurements of stress during electrodeposition of copper nanofilms: Current interruption effects, migration of atoms and the effect of chloride ions

Joe A. Murphy, Catherine Lenihan, Robert P. Lynch, D. Noel Buckley

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

Using a substrate curvature method, stress was monitored ui-situ in acidic CuSO4 electrolytes with and without chloride as an additive. Chloride in the electrolyte considerably reduced the tensile stress. Chloride-free and chloride-containing electrolytes also showed very different behaviors after interruption of electrodeposition. In chloride-free electrolyte, the tensile steady-state stress observed during deposition changed to compressive stress on interruption of the deposition. However, in chloride-containing electrolyte, the stress became even more tensile on interruption of deposition. The lower tensile stress in the presence of chloride is explained using a model based on the grain boundary diffusivity of copper and possible mechanisms for the behavior on current interruption are discussed.

Original languageEnglish
Title of host publicationMolecular Structure of the Solid-Liquid Interface and Its Relationship to Electrodeposition 8
EditorsG. Zangari, R. Alkire, T. Homma, L. A. Kibler
PublisherElectrochemical Society Inc.
Pages1-13
Number of pages13
Edition35
ISBN (Electronic)9781607687849
DOIs
Publication statusPublished - 2016
EventSymposium on Molecular Structure of the Solid-Liquid Interface and Its Relationship to Electrodeposition 8 - PRiME 2016/230th ECS Meeting - Honolulu, United States
Duration: 2 Oct 20167 Oct 2016

Publication series

NameECS Transactions
Number35
Volume75
ISSN (Print)1938-6737
ISSN (Electronic)1938-5862

Conference

ConferenceSymposium on Molecular Structure of the Solid-Liquid Interface and Its Relationship to Electrodeposition 8 - PRiME 2016/230th ECS Meeting
Country/TerritoryUnited States
CityHonolulu
Period2/10/167/10/16

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