Influence of temperature gradients on partial pressures in a low-pressure chemical-vapor-deposition reactor
- T. G.M. Oosterlaken
- , G. J. Leusink
- , G. C.A.M. Janssen
- , S. Radelaar
- , K. J. Kuijlaars
- , C. R. Kleijn
- , H. E.A. Van Den Akker
- Delft University of Technology
Research output: Contribution to journal › Article › peer-review