Influence of Zr and O on the structure and properties of TiC(N) coatings deposited by magnetron sputtering of composite TiC 0.5+ZrO 2 and (Ti, Zr)C 0.5+ZrO 2 targets

D. V. Shtansky, A. V. Bondarev, Ph V. Kiryukhantsev-Korneev, A. N. Sheveyko, Yu S. Pogozhev

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