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Influence of Zr and O on the structure and properties of TiC(N) coatings deposited by magnetron sputtering of composite TiC 0.5+ZrO 2 and (Ti, Zr)C 0.5+ZrO 2 targets

  • D. V. Shtansky
  • , A. V. Bondarev
  • , Ph V. Kiryukhantsev-Korneev
  • , A. N. Sheveyko
  • , Yu S. Pogozhev
  • National University of Science and Technology "MISiS"

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