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Insight into high temperature performance of magnetron sputtered Si-Ta-C-(N) coatings with an ion-implanted interlayer

  • A. V. Bondarev
  • , M. N. Antonyuk
  • , Ph V. Kiryukhantsev-Korneev
  • , T. Polcar
  • , D. V. Shtansky
  • Czech Technical University in Prague
  • National University of Science and Technology "MISiS"

Research output: Contribution to journal › Article › peer-review

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