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Interfaces analysis of the HfO2/SiO2/Si structure

  • T. P. Smirnova
  • , L. V. Yakovkina
  • , S. A. Beloshapkin
  • , V. V. Kaichev
  • , N. I. Alferova
  • , Song Jeong-Hwan
    • RAS - Siberian Branch
    • RAS - Boreskov Institute of Catalysis, Siberian Branch
    • Paichai University

    Research output: Contribution to journal › Article › peer-review

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