Investigation of the effect of growth interruption on the formation of InAs/GaAs quantum dot superlattice near the InAs critical thickness

R. J. Kashtiban, U. Bangert, M. Missous

Research output: Contribution to journalArticlepeer-review

Abstract

Two kinds of superlattices (i) with and (ii) without growth interrupt (GI) after deposition of 1.77 monolayers (ML) of InAs on GaAs (0 0 1) were grown by solid-source molecular beam epitaxy (MBE) and assessed by transmission electron microscopy (TEM) techniques, double crystal X-ray diffraction (DCXRD) and photoluminescence (PL) measurements in order to gain an understanding of the structural and compositional properties. In case (i) formation of coherent dislocation free self-organized quantum dots (SOQDs) with 2.8-3.2 nm height and 13-16 nm lateral size was observed, whereas in case (ii) no quantum dots had formed. In order to better understand the implication of growth interruption for the formation mechanism, highly localised assessment of the composition of the QD was carried out via atomic resolution Z-contrast imaging and electron energy loss spectroscopy (EELS).

Original languageEnglish
Pages (from-to)479-482
Number of pages4
JournalMicroelectronics Journal
Volume40
Issue number3
DOIs
Publication statusPublished - Mar 2009
Externally publishedYes

Keywords

  • EELS
  • HAADF
  • InAs quantum dots
  • Molecular beam epitaxy

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