Mechanism that Dictates Pore Width and <111>A Pore Propagation in InP

Robert P. Lynch, Nathan Quill, Colm O'Dwyer, Shohei Nakahara, D. Noel Buckley

Research output: Contribution to journalArticlepeer-review

Abstract

We report a mechanism for pore growth and propagation based on a three-step charge transfer model. The study is supported by electron microscopy analysis of highly doped n-InP samples anodised in aqueous KOH. The model and experimental data are used to explain propagation of pores of characteristic diameter preferentially along the <111>A directions. We also show evidence for deviation of pore growth from the <111>A directions and explain why such deviations should occur. The model is selfconsistent and predicts how carrier concentration affects the internal dimensions of the porous structures.

Original languageUndefined/Unknown
Pages (from-to)319-334
Number of pages16
JournalECS Transactions
Issue number6
DOIs
Publication statusPublished - 2013

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