@inproceedings{4253ff71358b40108b1f8001635be04c,
title = "Nanostructure and morphology of electrodeposited copper metallization during room-temperature aging",
abstract = "We describe the phenomenon of spontaneous morphology change (SMC) observed during room temperature aging of electrodeposited copper metallization after an incubation period. We discuss AFM observations and the use of isothermal annealing experiments to estimate an activation energy for the recovery (incubation) process. The results are compared with corresponding DSC measurements. A model for SMC is presented.",
author = "Buckley, {D. N.} and S. Ahmed and Ahmed, {T. T.} and S. Nakahara",
year = "2007",
doi = "10.1149/1.2767300",
language = "English",
isbn = "9781604238921",
series = "ECS Transactions",
publisher = "Electrochemical Society Inc.",
number = "1",
pages = "145--150",
booktitle = "ECS Transactions - 2007 International Conference on Semiconductor Technology for Ultra Large Scale Integrated Circuits and Thin Film Transistors, ULSIC vs.TFT",
edition = "1",
note = "2007 International Conference on SemiconductorTechnology for Ultra Large Scale Integrated Circuits and Thin Film Transistors, ULSIC vs. TFT ; Conference date: 29-07-2007 Through 03-08-2007",
}