TY - GEN
T1 - Nonlinear control design for a plasma process
AU - Iordanov, Petar
AU - Ringwood, John
AU - Doherty, Seán
PY - 2005
Y1 - 2005
N2 - This paper presents a nonlinear control design for a first-principles based model of an argon plasma process. In this study, a Hammerstein-type structure was employed as a basis for a feedback control design. Artificial neural networks were used to accurately model the static nonlinearity. In the developed Hammerstein model, variations in the process dynamics were accounted for by considering parametric uncertainty. A control design strategy based on μ-synthesis was applied to deliver good tracking performance and disturbance rejection.
AB - This paper presents a nonlinear control design for a first-principles based model of an argon plasma process. In this study, a Hammerstein-type structure was employed as a basis for a feedback control design. Artificial neural networks were used to accurately model the static nonlinearity. In the developed Hammerstein model, variations in the process dynamics were accounted for by considering parametric uncertainty. A control design strategy based on μ-synthesis was applied to deliver good tracking performance and disturbance rejection.
UR - http://www.scopus.com/inward/record.url?scp=33847233661&partnerID=8YFLogxK
U2 - 10.1109/CDC.2005.1582518
DO - 10.1109/CDC.2005.1582518
M3 - Conference contribution
AN - SCOPUS:33847233661
SN - 0780395689
SN - 9780780395688
T3 - Proceedings of the 44th IEEE Conference on Decision and Control, and the European Control Conference, CDC-ECC '05
SP - 2380
EP - 2385
BT - Proceedings of the 44th IEEE Conference on Decision and Control, and the European Control Conference, CDC-ECC '05
T2 - 44th IEEE Conference on Decision and Control, and the European Control Conference, CDC-ECC '05
Y2 - 12 December 2005 through 15 December 2005
ER -