Nonlinear control design for a plasma process

Petar Iordanov, John Ringwood, Seán Doherty

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

This paper presents a nonlinear control design for a first-principles based model of an argon plasma process. In this study, a Hammerstein-type structure was employed as a basis for a feedback control design. Artificial neural networks were used to accurately model the static nonlinearity. In the developed Hammerstein model, variations in the process dynamics were accounted for by considering parametric uncertainty. A control design strategy based on μ-synthesis was applied to deliver good tracking performance and disturbance rejection.

Original languageEnglish
Title of host publicationProceedings of the 44th IEEE Conference on Decision and Control, and the European Control Conference, CDC-ECC '05
Pages2380-2385
Number of pages6
DOIs
Publication statusPublished - 2005
Externally publishedYes
Event44th IEEE Conference on Decision and Control, and the European Control Conference, CDC-ECC '05 - Seville, Spain
Duration: 12 Dec 200515 Dec 2005

Publication series

NameProceedings of the 44th IEEE Conference on Decision and Control, and the European Control Conference, CDC-ECC '05
Volume2005

Conference

Conference44th IEEE Conference on Decision and Control, and the European Control Conference, CDC-ECC '05
Country/TerritorySpain
CitySeville
Period12/12/0515/12/05

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