Ozone sensing properties of NbO2 thin films for health and safety applications

Khalil Arshak; Ger Hickey; John Harris; Ed Forde

doi:10.1109/sas13374.2008.4472968

Ozone sensing properties of NbO₂ thin films for health and safety applications

Khalil Arshak
, Ger Hickey
, John Harris
, Ed Forde

University of Limerick
Department of Electronic and Computer Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

This work investigates the ozone sensing properties of NbO₂ thin films operating at room temperature. NbO₂ thin films have been deposited on alumina and glass substrates provide with Cu interdigitated electrodes by the Vacuum Thermal Evaporation technique. The optical properties of NbO₂ thin films were explored using CARY 1E UV-Visible Spectrophotometer. The values of the optical band gap EOPT are estimated in view of the Mott and Davis' theory. The electrical response has been measured by exposing the sensing layers to ozone (ppb). NbO₂ films fabricated by this method have shown good sensitivity to envinronmentally relevant ozone concentrations.

Original language	English
Title of host publication	2008 IEEE Sensors Applications Symposium, SAS-2008 - Proceedings
Publisher	IEEE Computer Society
Pages	187-192
Number of pages	6
ISBN (Print)	9781424419630
DOIs	https://doi.org/10.1109/sas13374.2008.4472968
Publication status	Published - 2008

Publication series

Name	2008 IEEE Sensors Applications Symposium, SAS-2008 - Proceedings

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

SDG 3 Good Health and Well-being

Keywords

Gas sensor
Niobium oxide
Ozone
Thin film
Vacuum thermal evaporation

Access to Document

10.1109/sas13374.2008.4472968

Cite this

Arshak, K., Hickey, G., Harris, J., & Forde, E. (2008). Ozone sensing properties of NbO₂ thin films for health and safety applications. In 2008 IEEE Sensors Applications Symposium, SAS-2008 - Proceedings (pp. 187-192). Article 4472968 (2008 IEEE Sensors Applications Symposium, SAS-2008 - Proceedings). IEEE Computer Society. https://doi.org/10.1109/sas13374.2008.4472968

@inproceedings{12890460132d45109740bc5e1c35e6ff,

title = "Ozone sensing properties of NbO2 thin films for health and safety applications",

abstract = "This work investigates the ozone sensing properties of NbO2 thin films operating at room temperature. NbO2 thin films have been deposited on alumina and glass substrates provide with Cu interdigitated electrodes by the Vacuum Thermal Evaporation technique. The optical properties of NbO2 thin films were explored using CARY 1E UV-Visible Spectrophotometer. The values of the optical band gap EOPT are estimated in view of the Mott and Davis' theory. The electrical response has been measured by exposing the sensing layers to ozone (ppb). NbO2 films fabricated by this method have shown good sensitivity to envinronmentally relevant ozone concentrations.",

keywords = "Gas sensor, Niobium oxide, Ozone, Thin film, Vacuum thermal evaporation",

author = "Khalil Arshak and Ger Hickey and John Harris and Ed Forde",

year = "2008",

doi = "10.1109/sas13374.2008.4472968",

language = "English",

isbn = "9781424419630",

series = "2008 IEEE Sensors Applications Symposium, SAS-2008 - Proceedings",

publisher = "IEEE Computer Society",

pages = "187--192",

booktitle = "2008 IEEE Sensors Applications Symposium, SAS-2008 - Proceedings",

}

Ozone sensing properties of NbO₂ thin films for health and safety applications. / Arshak, Khalil; Hickey, Ger; Harris, John et al.
2008 IEEE Sensors Applications Symposium, SAS-2008 - Proceedings. IEEE Computer Society, 2008. p. 187-192 4472968 (2008 IEEE Sensors Applications Symposium, SAS-2008 - Proceedings).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Ozone sensing properties of NbO2 thin films for health and safety applications

AU - Arshak, Khalil

AU - Hickey, Ger

AU - Harris, John

AU - Forde, Ed

PY - 2008

Y1 - 2008

N2 - This work investigates the ozone sensing properties of NbO2 thin films operating at room temperature. NbO2 thin films have been deposited on alumina and glass substrates provide with Cu interdigitated electrodes by the Vacuum Thermal Evaporation technique. The optical properties of NbO2 thin films were explored using CARY 1E UV-Visible Spectrophotometer. The values of the optical band gap EOPT are estimated in view of the Mott and Davis' theory. The electrical response has been measured by exposing the sensing layers to ozone (ppb). NbO2 films fabricated by this method have shown good sensitivity to envinronmentally relevant ozone concentrations.

AB - This work investigates the ozone sensing properties of NbO2 thin films operating at room temperature. NbO2 thin films have been deposited on alumina and glass substrates provide with Cu interdigitated electrodes by the Vacuum Thermal Evaporation technique. The optical properties of NbO2 thin films were explored using CARY 1E UV-Visible Spectrophotometer. The values of the optical band gap EOPT are estimated in view of the Mott and Davis' theory. The electrical response has been measured by exposing the sensing layers to ozone (ppb). NbO2 films fabricated by this method have shown good sensitivity to envinronmentally relevant ozone concentrations.

KW - Gas sensor

KW - Niobium oxide

KW - Ozone

KW - Thin film

KW - Vacuum thermal evaporation

UR - https://www.scopus.com/pages/publications/78649731670

U2 - 10.1109/sas13374.2008.4472968

DO - 10.1109/sas13374.2008.4472968

M3 - Conference contribution

AN - SCOPUS:78649731670

SN - 9781424419630

T3 - 2008 IEEE Sensors Applications Symposium, SAS-2008 - Proceedings

SP - 187

EP - 192

BT - 2008 IEEE Sensors Applications Symposium, SAS-2008 - Proceedings

PB - IEEE Computer Society

ER -