Patterning optically clear films: Coplanar transparent and color-contrasted thin films from interdiffused electrodeposited and solution-processed metal oxides

Colm Glynn, Hugh Geaney, David McNulty, John O'Connell, Justin Holmes, Colm O'Dwyer

Research output: Contribution to journalArticlepeer-review

Abstract

Transparent thin films can now be site-selectively patterned and positioned on surface using mask-defined electrodeposition of one oxide and overcoating with a different solution-processed oxide, followed by thermal annealing. Annealing allows an interdiffusion process to create a new oxide that is entirely transparent. A primary electrodeposited oxide can be patterned and the secondary oxide coated over the entire substrate to form high color contrast coplanar thin film tertiary oxide. The authors also detail the phase formation and chemical state of the oxide and how the nature of the electrodeposited layer and the overlayer influence the optical clearing of the patterned oxide film.

Original languageEnglish
Article number020602
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume35
Issue number2
DOIs
Publication statusPublished - 1 Mar 2017

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