Pressurized fluid damping of nanoelectromechanical systems
- Oleksiy Svitelskiy
- , Vince Sauer
- , Ning Liu
- , Kar Mun Cheng
- , Eric Finley
- , Mark R. Freeman
- , Wayne K. Hiebert
- National Research Council of Canada
- University of Alberta
- Micralyne Corp.
Research output: Contribution to journal › Article › peer-review