Abstract
Ge nanocrystals (NCs) embedded in Al2O3 were grown by RF-sputtering. X-ray diffraction, high resolution transmission electron microscopy, and Raman spectroscopy techniques were used to characterize the stresses on the NCs. While small NCs (< 10 nm) have been observed to be spherical and fully relaxed in the matrix, the larger ones (> 17 nm) demonstrated a compressive stress effect. This could be linked to the crystal structure of the adjacent Al2O3 matrix.
Original language | English |
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Pages (from-to) | 5378-5381 |
Number of pages | 4 |
Journal | Thin Solid Films |
Volume | 518 |
Issue number | 19 |
DOIs | |
Publication status | Published - 30 Jul 2010 |
Keywords
- Aluminium oxide
- Germanium
- Nanocrystals
- Raman spectroscopy
- Stress
- Transmission electron microscopy