Real-time ultrafast optical interferometry of NEMS operating in fluidic environment

Oleksiy Svitelskiy; Vince Sauer; Ning Liu; Kar Mun Cheng; Eric Finley; Mark R. Freeman; Wayne K. Hiebert

doi:10.1117/12.875752

Real-time ultrafast optical interferometry of NEMS operating in fluidic environment

Oleksiy Svitelskiy, Vince Sauer, Ning Liu, Kar Mun Cheng, Eric Finley, Mark R. Freeman, Wayne K. Hiebert

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

Interactions of NEMS with fluids are of interest both in determining the NEMS performance outside of vacuum, and in elucidation of fluid dynamics at these small scales. We present a comprehensive study of nanomechanical damping in three gases (He, N₂, CO₂), and liquid CO₂. Resonant dynamics in multiple devices of varying size and frequency (10-400 MHz) is measured over 10 decades of pressure (1 mPa-20 MPa). We find a fluid relaxation time model to be valid throughout, but not beyond, the non-Newtonian regime (up to several atmospheres), and classical vibrating spheres model to be valid in the viscous limit.

Original language	English
Title of host publication	Microfluidics, BioMEMS, and Medical Microsystems IX
DOIs	https://doi.org/10.1117/12.875752
Publication status	Published - 2011
Externally published	Yes
Event	Microfluidics, BioMEMS, and Medical Microsystems IX - San Francisco, CA, United States Duration: 23 Jan 2011 → 25 Jan 2011

Publication series

Name	Proceedings of SPIE - The International Society for Optical Engineering
Volume	7929
ISSN (Print)	0277-786X

Conference

Conference	Microfluidics, BioMEMS, and Medical Microsystems IX
Country/Territory	United States
City	San Francisco, CA
Period	23/01/11 → 25/01/11

Keywords

Biosensors
Fluid Damping
High Pressure
Microfluidics
NEMS Resonators
NEMS Sensors
Optical Interferometry
Viscousity

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10.1117/12.875752

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Svitelskiy, O., Sauer, V., Liu, N., Cheng, K. M., Finley, E., Freeman, M. R., & Hiebert, W. K. (2011). Real-time ultrafast optical interferometry of NEMS operating in fluidic environment. In Microfluidics, BioMEMS, and Medical Microsystems IX Article 79290V (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 7929). https://doi.org/10.1117/12.875752

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title = "Real-time ultrafast optical interferometry of NEMS operating in fluidic environment",

abstract = "Interactions of NEMS with fluids are of interest both in determining the NEMS performance outside of vacuum, and in elucidation of fluid dynamics at these small scales. We present a comprehensive study of nanomechanical damping in three gases (He, N2, CO2), and liquid CO2. Resonant dynamics in multiple devices of varying size and frequency (10-400 MHz) is measured over 10 decades of pressure (1 mPa-20 MPa). We find a fluid relaxation time model to be valid throughout, but not beyond, the non-Newtonian regime (up to several atmospheres), and classical vibrating spheres model to be valid in the viscous limit.",

keywords = "Biosensors, Fluid Damping, High Pressure, Microfluidics, NEMS Resonators, NEMS Sensors, Optical Interferometry, Viscousity",

author = "Oleksiy Svitelskiy and Vince Sauer and Ning Liu and Cheng, {Kar Mun} and Eric Finley and Freeman, {Mark R.} and Hiebert, {Wayne K.}",

year = "2011",

doi = "10.1117/12.875752",

language = "English",

isbn = "9780819484666",

series = "Proceedings of SPIE - The International Society for Optical Engineering",

booktitle = "Microfluidics, BioMEMS, and Medical Microsystems IX",

note = "Microfluidics, BioMEMS, and Medical Microsystems IX ; Conference date: 23-01-2011 Through 25-01-2011",

}

Svitelskiy, O, Sauer, V, Liu, N, Cheng, KM, Finley, E, Freeman, MR & Hiebert, WK 2011, Real-time ultrafast optical interferometry of NEMS operating in fluidic environment. in Microfluidics, BioMEMS, and Medical Microsystems IX., 79290V, Proceedings of SPIE - The International Society for Optical Engineering, vol. 7929, Microfluidics, BioMEMS, and Medical Microsystems IX, San Francisco, CA, United States, 23/01/11. https://doi.org/10.1117/12.875752

Real-time ultrafast optical interferometry of NEMS operating in fluidic environment. / Svitelskiy, Oleksiy; Sauer, Vince; Liu, Ning et al.
Microfluidics, BioMEMS, and Medical Microsystems IX. 2011. 79290V (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 7929).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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T1 - Real-time ultrafast optical interferometry of NEMS operating in fluidic environment

AU - Svitelskiy, Oleksiy

AU - Sauer, Vince

AU - Liu, Ning

AU - Cheng, Kar Mun

AU - Finley, Eric

AU - Freeman, Mark R.

AU - Hiebert, Wayne K.

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AB - Interactions of NEMS with fluids are of interest both in determining the NEMS performance outside of vacuum, and in elucidation of fluid dynamics at these small scales. We present a comprehensive study of nanomechanical damping in three gases (He, N2, CO2), and liquid CO2. Resonant dynamics in multiple devices of varying size and frequency (10-400 MHz) is measured over 10 decades of pressure (1 mPa-20 MPa). We find a fluid relaxation time model to be valid throughout, but not beyond, the non-Newtonian regime (up to several atmospheres), and classical vibrating spheres model to be valid in the viscous limit.

KW - Biosensors

KW - Fluid Damping

KW - High Pressure

KW - Microfluidics

KW - NEMS Resonators

KW - NEMS Sensors

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KW - Viscousity

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AN - SCOPUS:79958003514

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BT - Microfluidics, BioMEMS, and Medical Microsystems IX

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Real-time ultrafast optical interferometry of NEMS operating in fluidic environment

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