TY - GEN
T1 - Single toolset modeling approaches in semiconductor manufacturing
AU - Kabak, Kamil Erkan
AU - Heavey, Cathal
AU - Kernan, Brian
PY - 2012
Y1 - 2012
N2 - Traditional industrial engineering techniques including mathematical models are not sufficient to examine sophisticated manufacturing systems such as semiconductor manufacturing. As such, simulation modeling is used extensively in the design and analysis of semiconductor manufacturing operations. This study explores the use of simulation modeling of single semiconductor toolsets. In the literature a number of modeling approaches for single toolset analysis can be identified. The purpose of this study is to review and evaluate these approaches.
AB - Traditional industrial engineering techniques including mathematical models are not sufficient to examine sophisticated manufacturing systems such as semiconductor manufacturing. As such, simulation modeling is used extensively in the design and analysis of semiconductor manufacturing operations. This study explores the use of simulation modeling of single semiconductor toolsets. In the literature a number of modeling approaches for single toolset analysis can be identified. The purpose of this study is to review and evaluate these approaches.
UR - http://www.scopus.com/inward/record.url?scp=84874739099&partnerID=8YFLogxK
U2 - 10.1109/WSC.2012.6465135
DO - 10.1109/WSC.2012.6465135
M3 - Conference contribution
AN - SCOPUS:84874739099
SN - 9781467347792
T3 - Proceedings - Winter Simulation Conference
BT - Proceedings of the 2012 Winter Simulation Conference, WSC 2012
T2 - 2012 Winter Simulation Conference, WSC 2012
Y2 - 9 December 2012 through 12 December 2012
ER -