Single toolset modeling approaches in semiconductor manufacturing

Kamil Erkan Kabak; Cathal Heavey; Brian Kernan

doi:10.1109/WSC.2012.6465135

Single toolset modeling approaches in semiconductor manufacturing

Kamil Erkan Kabak
, Cathal Heavey
, Brian Kernan

School of Engineering

Beykent University
University of Limerick

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

Traditional industrial engineering techniques including mathematical models are not sufficient to examine sophisticated manufacturing systems such as semiconductor manufacturing. As such, simulation modeling is used extensively in the design and analysis of semiconductor manufacturing operations. This study explores the use of simulation modeling of single semiconductor toolsets. In the literature a number of modeling approaches for single toolset analysis can be identified. The purpose of this study is to review and evaluate these approaches.

Original language	English
Title of host publication	Proceedings of the 2012 Winter Simulation Conference, WSC 2012
DOIs	https://doi.org/10.1109/WSC.2012.6465135
Publication status	Published - 2012
Event	2012 Winter Simulation Conference, WSC 2012 - Berlin, Germany Duration: 9 Dec 2012 → 12 Dec 2012

Publication series

Name	Proceedings - Winter Simulation Conference
ISSN (Print)	0891-7736

Conference

Conference	2012 Winter Simulation Conference, WSC 2012
Country/Territory	Germany
City	Berlin
Period	9/12/12 → 12/12/12

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

SDG 9 Industry, Innovation, and Infrastructure

Access to Document

10.1109/WSC.2012.6465135

Cite this

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title = "Single toolset modeling approaches in semiconductor manufacturing",

abstract = "Traditional industrial engineering techniques including mathematical models are not sufficient to examine sophisticated manufacturing systems such as semiconductor manufacturing. As such, simulation modeling is used extensively in the design and analysis of semiconductor manufacturing operations. This study explores the use of simulation modeling of single semiconductor toolsets. In the literature a number of modeling approaches for single toolset analysis can be identified. The purpose of this study is to review and evaluate these approaches.",

author = "Kabak, \{Kamil Erkan\} and Cathal Heavey and Brian Kernan",

year = "2012",

doi = "10.1109/WSC.2012.6465135",

language = "English",

isbn = "9781467347792",

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note = "2012 Winter Simulation Conference, WSC 2012 ; Conference date: 09-12-2012 Through 12-12-2012",

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AU - Kabak, Kamil Erkan

AU - Heavey, Cathal

AU - Kernan, Brian

PY - 2012

Y1 - 2012

N2 - Traditional industrial engineering techniques including mathematical models are not sufficient to examine sophisticated manufacturing systems such as semiconductor manufacturing. As such, simulation modeling is used extensively in the design and analysis of semiconductor manufacturing operations. This study explores the use of simulation modeling of single semiconductor toolsets. In the literature a number of modeling approaches for single toolset analysis can be identified. The purpose of this study is to review and evaluate these approaches.

AB - Traditional industrial engineering techniques including mathematical models are not sufficient to examine sophisticated manufacturing systems such as semiconductor manufacturing. As such, simulation modeling is used extensively in the design and analysis of semiconductor manufacturing operations. This study explores the use of simulation modeling of single semiconductor toolsets. In the literature a number of modeling approaches for single toolset analysis can be identified. The purpose of this study is to review and evaluate these approaches.

UR - https://www.scopus.com/pages/publications/84874739099

U2 - 10.1109/WSC.2012.6465135

DO - 10.1109/WSC.2012.6465135

M3 - Conference contribution

AN - SCOPUS:84874739099

SN - 9781467347792

T3 - Proceedings - Winter Simulation Conference

BT - Proceedings of the 2012 Winter Simulation Conference, WSC 2012

T2 - 2012 Winter Simulation Conference, WSC 2012

Y2 - 9 December 2012 through 12 December 2012

ER -

Single toolset modeling approaches in semiconductor manufacturing

Abstract

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Conference

UN SDGs

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