Abstract
A complete analysis including finite element method (FEM) calculation, focal length properties, and thirdorder geometric aberrations of the open-source electrostatic lens from the NanoMi project is presented. The analysis is carried out by the software TEMGYM Advanced, a free package developed to carry out ray-tracing and lens characterisation in Python. Previously TEMGYM Advanced has shown how to analyse the aberrations of analytical lens fields; this paper expands upon this work to demonstrate how to apply a suitable fitting method to discrete lens fields obtained via FEM methods so that the aberrations of real lens designs can be calculated. Each software platform used in this paper is freely available in the community and creates a free and viable alternative to commercial lens design packages.
Original language | English |
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Article number | 103450 |
Pages (from-to) | 103450 |
Journal | Micron |
Volume | 169 |
DOIs | |
Publication status | Published - Jun 2023 |
Keywords
- Aberration integral
- Differential algebra
- Finite element method
- NanoMi
- Parallelisation
- Ray tracing