Ti-Zr-Nb-(V) refractory alloy coatings deposited by high-power impulse magnetron sputtering: Structure, mechanical properties, oxidation resistance, and thermal stability

A. Fraile, D. Cavaleiro, A. Bondarev, S. C. Middleburgh, W. E. Lee, F. Fernandes

Research output: Contribution to journalArticlepeer-review

Abstract

A series of TiZrNb(V) high entropy alloy-based metallic coatings have been deposited using high-power impulse magnetron sputtering (HiPIMS), with variable V concentrations and constant ratios among the other metals. The coatings were analyzed regarding their composition, surface and cross-sectional morphologies, microstructure, roughness, mechanical properties, oxidation resistance, and thermal stability. The structure of the deposited coatings reveals a transition from the bcc crystal structure to an amorphous phase as the V concentration increases. The addition of V also led to a decrease in roughness Ra and an improvement in adhesion, while it did not affect hardness, which remained at ∼10-11 GPa for all samples. Annealing under a protective atmosphere at 400 °C caused structural ordering, which was followed by an increase in mechanical properties. The purpose of the present paper is, therefore, to present a study on the deposition of TiZrNb coatings with increasing V concentration prepared by HiPIMS and to understand the role of V concentration on their structure, chemical composition, mechanical properties, and oxidation resistance. Comparison of the results with those achieved for a reference TiZrNb coating is presented too.

Original languageEnglish
Article number063101
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume42
Issue number6
DOIs
Publication statusPublished - 1 Dec 2024

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