Tribological Properties of Ta–Si–C–N Coatings Obtained by Magnetron Sputtering

Abstract: Ta–Si–C–(N) coatings were obtained by magnetron sputtering of a TaSi₂–30% SiC target in an Ar, N₂, and Ar + 15% N₂ gas mixture. The structure and mechanical characteristics of coatings were studied, with special attention paid to the tribological properties of coatings under liquid friction conditions. Results showed that the coatings have a dense, low-defect nanocomposite structure. The Ta–Si–C coating’s main structural component was the TaC phase. Introduction of nitrogen into the gas-medium composition promoted the formation of Ta(C,N) phase. In the coating deposited in N₂, the silicon-nitride-based phase was predominant. An increase in the nitrogen concentration led to a decrease in hardness from 27 to 16 GPa and in elastic modulus from 265 to 160 GPa. Coatings had a friction coefficient of 0.12–0.13. A coating obtained in an Ar + 15% N₂ environment was characterized by a minimum reduced wear of 6.1 × 10^–6 mm³ N^–1 m^–1.