Vertical comb drive actuator for the measurement of piezoelectric coefficients in small-scale systems

  • J. Wooldridge
  • , A. Muniz-Piniella
  • , M. Stewart
  • , T. A.V. Shean
  • , P. M. Weaver
  • , M. G. Cain

Research output: Contribution to journal › Article › peer-review

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